Kepner Products Pilot/Gauge Manifold ASM Epsilon 3000 Wafer Transfer Module Used Tegal Part No: VME-PS400-01

Tegal Part No: VME-PS400-01

Part No: SPR-3636A

Part No: S2N4FB12AY

Inventory # A-13089

Kepner Products Pilot/Gauge Manifold ASM Epsilon 3000 Wafer Transfer Module Used Tegal Part No: VME-PS400-01Kepner Products Pilot Gauge Manifold ASM Epsilon 3000 Wafer Transfer Module Used Inventory # K 5634 This Kepner Products Pilot Gauge Manifold is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a ASM Epsilon 3000 Wafer Transfer Module. Specifications Part No: Pilot Gauge Manifold Removed from a ASM Epsilon 3000 Wafer Transfer Module Sale Details Item Condition: Used Working, 90 Day